Model Research On Synthesis Of Al2O3-C Layers By MOCVD

Open access


These are model studies whose aim is to obtain information that would allow development of new technology for synthesizing monolayers of Al2O3-C with adjusted microstructure on cemented carbides. The Al2O3-C layer will constitute an intermediate layer on which the outer layer of Al2O3 without carbon is synthesized. The purpose of the intermediate layer is to block the cobalt diffusion to the synthesized outer layer of Al2O3 and to stop the diffusion of air oxygen to the substrate during the synthesis of the outer layer. This layer should be thin, continuous, dense and uniform in thickness.

Al2O3-C layers were synthesized from aluminum acetylacetonate by the CVD method on quartz glass heated in an induction furnace in the temperature range 800-1000°C using argon as a carrier for the reactants. The layers were prepared also at low temperatures and were then subjected to crystallization at higher temperatures. The resulting layers prepared at temperatures above 900°C were nanocrystalline (including the α-Al2O3 phase). Due to the fact that crystallization can be controlled, we may have a greater influence on the structure and thus the properties of the layer compared to direct synthesis at high temperature.

[1] R. Funk, H. Schachner, C. Triquet, M. Kornmann, B. Lux, Journal of Electrochemical Society 123, 285 (1976).

[2] M. Fallqvist, M. Olsson, S. Ruppi, Wear 74, 263 (2007).

[3] A. Kwatera, Thin Solid Films 200, 19 (1991).

[4] B. Lux, C. Colombier, H. Altena, K.G. Stjernberg, Thin Solid Films 138, 49 (1986).

[5] M. Halversson, S. Vourinen, Materials Science and Engeneering A209, 337 (1996).

[6] N. Lindulf, M. Halversson, H. Norden, S. Vourinen, Thin Solid Films 253, 311 (1994).

[7] M. Halvarsson, J. E. Trancik, S. Ruppi, International. Journal of Refractory Metals and Hard Materials 24, 32 (2006).

[8] E. Fredrikson, J.O. Carlssson, Thin Solid Films 263, 28 (1995).

[9] A. Kwatera, Ceramic International 17, 11 (1991).

[10] L.A. Dobrzański, D. Pakuła, A. Križ, M. Sekovič, J. Kopač, Journal of Materials Processing Technology 175, 179 (2006).

[11] A. Osada, E. Nakamura, H. Tomma, T. Hayashi, T. Oshika, International Journal of Refractory Metals and Hard Materials 24, 387 (2006).

[12] A. Sawka, A. Kwatera, W. Juda, Powder Metallurgy Progress 8, 242 (2008).

[13] W. Juda, A. Kwatera, A. Sawka, Powder Metallurgy Progress 8, 248 (2008).

[14] L. A. Dobrzański, D. Pakuła, Journal of Materials Processing Technology 165, 832 (2005).

[15] A. Kwatera, A. Sawka, Journal of Non-Crystalline Solids 265, 120 (2000).

[16] R. Pampuch, Współczesne materiały ceramiczne, Wyd. AGH, Kraków 2005.

Archives of Metallurgy and Materials

The Journal of Institute of Metallurgy and Materials Science and Commitee on Metallurgy of Polish Academy of Sciences

Journal Information

IMPACT FACTOR 2016: 0.571
5-year IMPACT FACTOR: 0.776

CiteScore 2016: 0.85

SCImago Journal Rank (SJR) 2016: 0.347
Source Normalized Impact per Paper (SNIP) 2016: 0.740

Cited By


All Time Past Year Past 30 Days
Abstract Views 0 0 0
Full Text Views 148 148 24
PDF Downloads 43 43 11