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Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates


Chemical vapor deposition (CVD) process was conducted for synthesis of boron (B) doped aluminum nitride (B-AlN) thin films on aluminum (Al) substrates. To prevent melting of the Al substrates, film deposition was carried out at 500 °C using tert-buthylamine (tBuNH2) solution delivered through a bubbler as a nitrogen source instead of ammonia gas (NH3). B-AlN thin films were prepared from three precursors at changing process parameters (gas mixture ratio). X-ray diffraction (XRD) technique and atomic force microscope (AFM) were used to investigate the structural and surface properties of B-AlN thin films on Al substrates. The prepared thin films were polycrystalline and composed of mixed phases {cubic (1 1 1) and hexagonal (1 0 0)} of AlN and BN with different orientations. Intensive AlN peak of high intensity was observed for the film deposited at a flow rate of the total gas mixture of 25 sccm. As the total gas mixture flow decreased from 60 sccm to 25 sccm, the crystallite size of AlN phase increased and the dislocation density decreased. Reduced surface roughness (10.4 nm) was detected by AFM for B-AlN thin film deposited on Al substrate using the lowest flow rate (25 sccm) of the total gas mixture.

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Tribological Properties of PVD Carbon-Copper Composite Films Reinforced by Titanium

., Naudon, A., Jaouen, M., Thiaudiére, D., and Babonneau, D. (1999). Cosputtering C-Cu thin film synthesis: Microstructural study of copper precipitates encapsulated into a carbon matrix. Philosophical Magazine Part B, 79 (3), 501–516. 5. Musil, J., Louda, M., Soukup, Z., and Kubásek, M. (2008). Relationship between mechanical properties and coefficient of friction of sputtered a-C/Cu composite thin films. Diamond & Related Materials , 17 (11), 1905–1911. 6. Mitin, V., Sharipov, E., and Mitin, A. (2006). High deposition rate magnetrons – innovative coating

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Study of Copper Nitride Thin Film Structure

semiconductors for solar energy conversion. J. Phys. Chem. Lett. 5 , 1117–1125. DOI: 10.1021/jz5001787. 10. Caskey, Ch. M., Richards, R.M., Ginleya, D.S., and Zakutayev, A. (2014). Thin film synthesis and properties of copper nitride, a metastable semiconductor. Mater. Horiz. 1 , 424–430. DOI: 10.1039/c4mh00049h. 11. Pierson, J.F. (2002). Structure and properties of copper nitride films formed by reactive magnetron sputtering. Vacuum 66 , 59–64. DOI: 10.1016/S0042-207X(01)00425-0. 12. Maruyama, T., and Morishita, T. (1995). Copper nitride thin films

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Polycarbonate/Polypropylene-Graft-Maleic Anhydride and Nano-Zeolite-Based Nanocomposite Membrane: Mechanical and Gas Separation Performance

and thin films: synthesis and applications, Chem. Soc. Rev. 43 (2014) 4470-4493. 12. Ghosh A. K., Hoek E. M., Impacts of support membrane structure and chemistry on polyamide–polysulfone interfacial composite membranes, J. Membr. Sci. 336 (2009) 140-148. 13. Kim M., Lee S.: Characteristics of porous polycarbonate membrane with polyethylene glycol in supercritical CO 2 and effect of its porosity on tearing stress, J. Supercrit. Fluids. 31 (2004) 217-225. 14. Li Y., He G., Wang S., Yu S., Pan F., Wu, H., Jiang, Z.: Recent advances in the fabrication

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