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Integral equations for free-molecule ow in MEMS: recent advancements

simu- lation, Springer, 2002 6. M.M.R. Williams, A review of the rarefied gas dynamics theory associated with some classical problems in ow and heat transfer, Z. Angew. Math. Phys., vol. 52, pp. 500-516, 2001 7. A. Frangi, A. Ghisi, L. Coronato, On a deterministic approach for the evaluation of gas damping in inertial MEMS in the free-molecule regime, Sensor & Actuators A, vol. 49, pp. 21-28, 2009 8. A. Frangi, BEM technique for free-molecule flows in high frequency MEMS resonators, Engineering Analysis with Boundary

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Influence of controlled deposition rate on mechanical properties of sputtered Ti thin films for MEMS application

1 Introduction Titanium thin films have been widely used in different areas of semiconductor device technology because of their desirable mechanical properties, such as high hardness, good corrosion and wear resistance, metallurgical stability and seem to be the best replacement of polycrystalline Si in very large-scale integrated circuits [ 1 - 4 ]. For the development of new materials in MEMS application, in addition to their mechanical characteristics including high hardness and good elasticity, fine adhesion and low interface stresses may play an

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Bias Drift Estimation for MEMS Gyroscope Used in Inertial Navigation

REFERENCES 1. Acosta Calderon C.A., Mohan E.R., Ng B.S. (2015), Development of a hospital mobile platform for logistics tasks, Digital Communications and Networks , 1 (2), 102-111. 2. Allan D.W. (1966), Statistics of atomic frequency standards, Proceedings of the IEEE , 54 (2), 221-230. 3. Barrett J.M. (2014), Analyzing and Modeling Low-Cost MEMS IMUs for use in an Inertial Navigation System , Worcester Polytechnic Institute. 4. Chatterjee G., Latorre L., Mailly F., Nouet P., Hachelef N., Oueda C. (2015), Smart-MEMS based

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Electrostatic field in terms of geometric curvature in membrane MEMS devices

-Directional Actuation System for MEMS Application, Journal Microeletromechanic Systems, vol. 9, pp. 245-251, 2000. 5. A. Ludwig and E. Quandt, Giant Magnetostrictive Thin Films for Application in Microelectromechanical Systems, Journal of Applied Physics, vol. 87, pp. 4691-4695, 2000. 6. M. Elwenspoek and R. Wiegerink, Micromechanical Sensors. 2001. 7. S.D. Senturia, Microsystem Design. Kluwer Academic Publisher, 2001. 8. E. Schaffer and T Thurn-Albrecht and T.P. Russell and U. Steiner, Electrically Induced Structure

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WYZNACZANIE POŁOŻENIA GŁOWICY OPTOELEKTRONICZNEJ Z WYKORZYSTANIEM CZUJNIKÓW MEMS

Literatura 1. Datasheet, L3GD20H: MEMS motion sensor: three-axis digital output gyroscope , STMicroelectronics, marzec 2013, Doc ID 023469 Rev 2. 2. Datasheet, LSM303D: Ultra compact high performance e-Compass 3D accelerometer and 3D magnetometer module , STMicroelectronics, czerwiec 2012, Doc ID 023312 Rev 1. 3. Grygiel R., Bieda R., Wojciechowski K.: Metody wyznaczania kątów z żyroskopów dla filtru komplementarnego na potrzeby określenia orientacji IMU , „Przegląd Elektrotechniczny” 2014, nr 9. 4. Ozyagilar T.: Implementing a Tilt

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Determination Of The Position Of The Optoelectronic Gimbal Using MEMS Sensors

References 1. Datasheet, L3GD20H: MEMS motion sensor: three-axis digital output gyroscope , STMicroelectronics, marzec 2013, Doc ID 023469 Rev 2. 2. Datasheet, LSM303D: Ultra compact high performance e-Compass 3D accelerometer and 3D magnetometer module , STMicroelectronics, czerwiec 2012, Doc ID 023312 Rev 1. 3. Grygiel R., Bieda R., Wojciechowski K.: Metody wyznaczania kątów z żyroskopów dla filtru komplementarnego na potrzeby określenia orientacji IMU , „Przegląd Elektrotechniczny” 2014, nr 9. [ Methods of angle estimation with the use of

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Design of MEMS accelerometer based acceleration measurement system for automobiles

Abstract

Design of an acceleration measurement system using a MEMS accelerometer to measure acceleration of automobiles in all the three axes is presented. Electronic stability control and anti-lock breaking systems in automobiles use the acceleration measurements to offer safety in driving. The system uses an ARM microcontroller to quantize the outputs of accelerometer and save the measurement data on a microSD card. A LabVIEW program has been developed to analyze the longitudinal acceleration measurement data and test the measurement system. Random noises generated and added with measurement data during measurement are filtered by a Kalman filter implemented in LabVIEW. Longitudinal velocity of the vehicle is computed from the measurement data and displayed on a graphical chart. Typical measurement of velocity of a vehicle at different accelerations and decelerations is presented.

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Researches on Inertial Mechatronic Motion Analysis Systems, Based on MEMS

Abstract

The aim of this paper is to provide an introduction into the inertial motion analysis field, focusing its attention on the analysis that is performed using modern mechatronic inertial motion capture systems, highlighting both the advantages and drawbacks of using such a system and outlining the main constituent elements of these systems as well as the necessary steps to be carried out in order to be able to accomplish such analysis.

A modern mechatronic inertial motion analysis system’s evolution it’s based on MEMS (Micro-Electro-Mechanical-Systems) sensory network, each of which contains a combination of accelerometer, gyroscope, magnetometer. The signals from these MEMS are processed, by a microcontroller, using advanced algorithms in order to provide accurate data regarding body’s segments kinematics, global positioning and magnetic field. Those data are being transferred to a biomechanical model for the analysis. Despite its tremendous advantages, such as portability and real-time analysis capabilities, over alternative motion analysis systems, such as optical or mechanical systems, that based on external transmitters and/or video camera networks, restricting their use to special laboratory conditions and/or large workspace, mechatronic inertial systems are not based on an external infrastructure, they present a major disadvantage, namely the positional drift. The estimation of the human subject body’s segments positions and orientation, absolutely requires an initial calibration procedure, called „sensor to segment calibration”, that starts from the positional and orientation information received from the MEMS network, which are then transferred onto a biomechanical (scaled) model of the human body.

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Mems Technology Quality Requirements as Applied to Multibeam Echosounder

technology for underwater applications, , Indian Journal OF Geo Marine Science 2009. 5. Prandi L., Caminada C., Coronato L.: A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout- Solid-State Circuits , 2011, ieeexplore 6. Zhu R., Sun D., Zhou Z., Wang D.: A linear fusion algorithm for attitude determination using low cost MEMS-based sensors - Measurement, 2007 - Elsevier 7. Luczak S., Oleksiuk W., Bodnicki M.: Sensing tilt with MEMS accelerometers- IEEE Sensors Journal, 2006

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Low Cost Integrated Navigation System for Unmanned Vessel

flowaided navigation for UAV: A novel information fusion of integrated MEMS navigation system. Optik, (127), 447-451. 7. M. Morgado, P. Oliveira, and C. Silvestre, 2010. Design and experimental evaluation of an integrated USBL/INS system for AUVs. In: IEEE International Conference on Robotics and Automation, Alaska, pp.4264-4269. 8. Y. Geng, R. Martins, J. Sousa, 2010. Accuracy Analysis of DVL/IMU/Magnetometer Integrated Navigation System using Different IMUs in AUV. In: IEEE International Conference on Control and Automation, Xiamen, pp

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