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Influence of controlled deposition rate on mechanical properties of sputtered Ti thin films for MEMS application

1 Introduction Titanium thin films have been widely used in different areas of semiconductor device technology because of their desirable mechanical properties, such as high hardness, good corrosion and wear resistance, metallurgical stability and seem to be the best replacement of polycrystalline Si in very large-scale integrated circuits [ 1 - 4 ]. For the development of new materials in MEMS application, in addition to their mechanical characteristics including high hardness and good elasticity, fine adhesion and low interface stresses may play an

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Mechanical Characterization of Nanostructured Thin Films Used to Imporve Mechatronic Components

nanotechnologies in mechatronics. Bucharest: Ed. CEFIN, 2009. [5] Buschan B. Springer Handbook of Nanotechnology, New York: Springer, 2007. [6] Gornoava V., Gheorghe Gh.I., Badita L.L. Tribological characterization of the nanostructured thin films deposited by intelligent methods, for mechatronic and biomedical applications. The Scientific Bulletin of Valahia University - Materials and Mechanics 2016; 14(11): 69-74. [7] [8] Bhushan B. Handbook of Micro

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Kinetic Behavior of LiFePO4/C Thin Film Cathode Material for Lithium-Ion Batteries

. ISBN: 0-8247-4249-4. Pike Research. Lithium Ion Batteries for Electric Vehicles to Approach $8 Billion in Sales by 2015. [Online] 2009, [reference 28.06.2010.] Patil A., Patil V., Shin D. W., Choi J.-W., Paik D.-S., Yoon S.-J., Issues and Challenges Facing Rechargeable Thin Film Lithium Batteries, Materials Research Bulletin , 2008, vol.43, p.1913

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Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films

R eferences [1] A. Vašíček, Optics of Thin Films , North–Holland, Amsterdam, 1960. [2] Z. Knittl, Optics of Thin Films , Wiley, London, 1976. [3] O. Stenzel, The Physics of Thin Film Optical Spectra , Surface Sciences, Springer, Berlin, 2005. [4] A. Vašíček, “Polarimetric methods for the determination of the refractive index and the thickness of thin films on glass”, J. Opt. Soc. Am. , vol. 37, pp. 145–153, 1947. [5] I. Ohlídal, K. Navrátil, E. Schmidt, “Simple method for the complete optical analysis of very thick and weakly

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Optical properties of the plasma hydrogenated ZnO thin films

electronic properties of H-doped ZnO”, Optical and Quantum Electronics , vol. 48 no. 5 (2016),. [4] P. Kelly and R. Arnell, “Magnetron sputtering: a review of recent developments and applications”, Vacuum , vol. 56 no. 3 (2000), 159-172. [5] Z. Remes, J. Stuchlik, A. Purkrt, Y.-Y. Chang, J. Jirasek, P. Stenclova, V. Prajzler and P. Nekvindova, “ZnO Thin Films Prepared by Reactive Magnetron Sputtering”, NANOCON 2016 - 8th International Conference on Nanomaterials - Research and Application , Conference Proceedings, 8 vol. Hotel Voronez I, Brno, Czech Republic

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Tribological Characterization of the Nanostructured Thin Films Deposited by Intelligent Methods, for Mechatronic and Biomedical Applications

of Bucharest, 2008. [5] Springer Handbook of Nanotechnology, Buschan Editor. [6] R. Pato, “Multifunctional Titanium Nitride Thin Films”, PhD thesis. [7] G. Vermesan and colab., “Introduction to surface engineering”, Dacia Publishing House, Cluj-Napoca, Romania, 1999. [8] A. W. Robert and A. B. Heather, “Basic Theory Atomic Force Microscopy (AFM)”. Department of Chemistry, Northern Kentucky University, Highland Heights, KY 41099. [9] Patent no. 128144/30.06.2014, “Coating methods of the metal parts with lubricant thin layers”. [10

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Synthesis and characterization of polyimide thin films obtained by thermal evaporation and solid state reaction

-step reaction, as shown in Fig. 2 . We used pyromellitic dianhydride (PMDA) and p-phenylene diamine (PDA), commercially available from Sigma-Aldrich. These two monomers, 2 g each, were evaporated from two separate boats to form a poly (amic acid) (PAA) thin film on a substrate. The substrates used were silicon wafers and glass. The deposition process was carried out in vacuum of 2 × 10 –3 Pa. Fig. 1 shows the scheme of the PVD apparatus [4] . The resultant polyamic acid PAA film was then soft baked to remove the H 2 O from the substrate followed by a thermal treatment at

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Production of ZnO and CdO-ZnO thin Films by Extraction–Pyrolytic Method

-gel synthesized amorphous Zn (1−x) Mg (x) O films. Appl. Phys. Lett . 98 , 261913. 4. Bae, H.S., and Seogil, I. (2004). Ultraviolet detecting properties of ZnO-based thin film transistors. Thin Solid Films. 469–470 , 75–79. 5. Chou, Sh.M., Teoh, L.G., Lai, W.H., Su, Y.H., and Hon, M.H. (2006). ZnO:Al thin film gas sensor for detection of ethanol vapor. Sensors . 6, 1420–1427. 6. Zhao, Zh., Lei, W., Zhang, X., Wang B., and Jiang, H. (2010). ZnO-Based Amperometric Enzyme Biosensors. Sensors . 10 , 1216–1231. 7. Chu, Sh., Olmedo, M., Yang, Zh., Kong

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Structural and optical characterization of Cu doped ZnO thin films deposited by RF magnetron sputtering

References [1] S. Ilican, Y. Caglar, M. Caglar and B. Demirci, “Polycrystalline indium-doped ZnO thin films: preparation and characterization”, Journal of optoelectronics and advanced materials , vol. 10, pp. 2592–2598, 2008. [2] M. Suchea, S. Christoulakis, K. Moschovis, N. Katsarakis and G. Kiriakidis, “ZnO transparent thin films for gas sensor applications”, Thin Solid Films , vol. 515, pp. 551–554, 2006. [3] J. Huang, Z. Yin and Q. Zheng, “Applications of ZnO in organic and hybrid solar cells”, Energy&Environmental Science , vol. 4, pp

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Fabrication and properties of zinc oxide thin film prepared by sol-gel dip coating method

. [6] KLEIN C.L., Sol-gel technology for thin films, fibres, performs, electronics, and specialty shapes, Noyes Publications, New Jersey, 1988. [7] LOPEZ M.T., AVNIR D., AEGERTER M., Emerging fields in sol-gel science and technology, Kluwer Academic Publishers, London, 2003. [8] KAYANI N.Z., AFZAL T., RIAZ S., NASEEM S., J. Alloy.Compd., 606 (2014), 177. [9] ANNA K., NINA P., YURI K., MEINHARD M., WERNER Z., AHARON G., Ultrason. Sonochem., 15 (2008), 839. [10] LI H., WANG J., LIU H., YANG C., XU H., LI X

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