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Agnieszka Banaszak-Piechowska, Kazimierz Fabisiak, Elżbieta Staryga and Kazimierz Paprocki

Abstract

The influence of diamond crystallinity and preferred orientation on electronic conductivity of synthetic diamond films grown by hot filament chemical vapor deposition (HFCVD) was investigated. The CVD diamond films of different morphologies and crystallite sizes varying from 36 nm to 67 nm, measured in h2 2 0i direction were considered. The charge transport mechanism in the diamond samples was studied using temperature dependent DC conductivity measurements. The obtained results showed that in the temperature range of 90 K to 300 K charge transport is realized via Variable Range Hopping (VRH, m = 1/4) mechanism. Using VRH model, the Mott parameters were evaluated i.e. density of states at Fermi level N(EF) (0.22 × 1015 eV-1·cm-3 to 1.7 × 1015 eV-1·cm-3), hopping energy W (43.5 meV to 142.3 meV) and average hopping distance R (1.49 × 10-5cm to 2.56 × 10-5cm). It was shown that above mentioned parameters strongly depend on diamond film preferential orientation.

Open access

Anna Dychalska, Kazimierz Fabisiak, Kazimierz Paprocki, Alina Dudkowiak and Mirosław Szybowicz

Abstract

Evolution of residual stress and its components with increasing temperature in chemical vapor deposited (CVD) diamond films has a crucial impact on their high temperature applications. In this work we investigated temperature dependence of stress in CVD diamond film deposited on Si(100) substrate in the temperature range of 30 °C to 480 °C by Raman mapping measurement. Raman shift of the characteristic diamond band peaked at 1332 cm-1 was studied to evaluate the residual stress distribution at the diamond surface. A new approach was applied to calculate thermal stress evolution with increasing tempera­ture by using two commonly known equations. Comparison of the residts obtained from the two methods was presented. The intrinsic stress component was calculated from the difference between average values of residual and thermal stress and then its temperature dependence was discussed.

Open access

Renata Kabacińska, Janusz Winiecki, Krzysztof Przegiętka, Mirosław Szybowicz, Kazimierz Fabisiak and Kazimierz Paprocki

Abstract

Thermally stimulated luminescence (TL), cathodoluminescence (CL) and Raman spectroscopy of CVD diamond films grown on silicon substrates have been studied in order to obtain information on defects created during the growth, which induce the levels within the gap. TL between 300 K and 700 K, and CL from 200 nm to 1200 nm have been teasured. The glow curves show a peak located around 610 K with different intensities, depending on the sample thickness, associated with a trap of energy, equal to 0.83 eV and with attempt-to-escape-time of the order of 108 s-1. Broad CL bands observed at 428±1 nm (2.90 ±0.01 eV) and 500±1 nm (2.47±0.004 eV) are attributed to closely spaced and widely separated donor-acceptor (D-A) pairs, respectively. The TL and CL results were correlated with diamond quality estimated from Raman spectroscopy measurements.

Open access

Anna Dychalska, Piotr Popielarski, Wojciech Franków, Kazimierz Fabisiak, Kazimierz Paprocki and Mirosław Szybowicz

Abstract

Raman spectroscopy is a most often used standard technique for characterization of different carbon materials. In this work we present the Raman spectra of polycrystalline diamond layers of different quality, synthesized by Hot Filament Chemical Vapor Deposition method (HF CVD). We show how to use Raman spectroscopy for the analysis of the Raman bands to determine the structure of diamond films as well as the structure of amorphous carbon admixture. Raman spectroscopy has become an important technique for the analysis of CVD diamond films. The first-order diamond Raman peak at ca. 1332 cm−1 is an unambiguous evidence for the presence of diamond phase in the deposited layer. However, the existence of non-diamond carbon components in a CVD diamond layer produces several overlapping peaks in the same wavenumber region as the first order diamond peak. The intensities, wavenumber, full width at half maximum (FWHM) of these bands are dependent on quality of diamond layer which is dependent on the deposition conditions. The aim of the present work is to relate the features of diamond Raman spectra to the features of Raman spectra of non-diamond phase admixture and occurrence of other carbon structures in the obtained diamond thin films.