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  • Author: G. Maier x
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P. Siffalovic, K. Vegso, M. Jergel, E. Majkova, J. Keckes, G. Maier, M. Cornejo, B. Ziberi, F. Frost, B. Hasse and J. Wiesmann

Measurement of nanopatterned surfaces by real and reciprocal space techniques

A newly developed laboratory grazing-incidence small-angle X-ray scattering GISAXS system capable of statistical measurements of surface morphology at the nanometer scale was developed. The potential of the GISAXS system is compared to the AFM technique for a nanopatterned silicon surface produced by ion-beam erosion. The characteristic period of the ion-beam induced ripples and their lateral correlation length were estimated from AFM. Using GISAXS the reciprocal space map of surface morphology was measured and analyzed. The two microfocus X-ray sources emitting radiation at the Cu-Kα and Cr-Kα were used. The lateral periods of ripples obtained by the reciprocal space mapping techniques match the results of real space techniques. The setup has the potential to monitor and control the deposition process and formation of nanostructures with sufficient temporal and spatial resolution.

Open access

L. Chitu, P. Siffalovic, E. Majkova, M. Jergel, K. Vegso, S. Luby, I. Capek, A. Satka, J. Perlich, A. Timmann, S. Roth, J. Keckes and G. Maier

Modified Langmuir-Blodgett deposition of nanoparticles - measurement of 2D to 3D ordered arrays

The ordered nanoparticle monolayers and multilayers over macroscopic areas were prepared by the modified Langmuir-Blodgett method. Using this approach, the nanoparticle monolayer is formed on the water surface by compression and subsequently it is transferred onto the substrate by a controlled removal of the water subphase. The ordering and homogeneity of the prepared mono- and multilayers was studied by scanning electron microscope (SEM), grazing-incidence small-angle X-ray scattering (GISAXS) and X-ray reflectivity (XRR) techniques. From the results it follows that an ordered nanoparticle monolayer was formed over a large area. For the multilayer, the layering and lateral ordering of each layer was confirmed by XRR and SEM performed after the deposition of each nanoparticle layer.