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E. Kawate and M. Hain

New Scatterometer for Spatial Distribution Measurements of Light Scattering from Materials

A new scatterometer is composed of two ellipsoidal mirrors of revolution and an optical detection system. It enables us to absolutely measure diffuse reflectance and transmittance and to measure the spatial distribution of light scattering from almost all materials. The optical detection system has been developed both to measure total photo-intensity using a photodiode and to capture the imaging data using a CCD camera. This results in faster, more complete and often more accurate measurements than can be achieved with traditional goniometric methods and integrated sphere methods. The absolute total integrated reflectance and transmittance of well-known samples were measured and the spatial distribution of light scattering from a diffraction grating was captured and evaluated.