This paper deals with the study of thermoelastic thin beam in a modified couple stress with three-phase-lag thermoelastic diffusion model subjected to thermal and chemical potential sources. The governing equations are derived by using the Euler-Bernoulli beam assumption and eigenvalue approach. The Laplace transform technique is employed to obtain the expressions for displacements, lateral deflection, temperature change, axial stress and chemical potential. A particular type of instantaneous and distributed sources is taken to show the utility of the approach. The general algorithm of the inverse Laplace transform is developed to compute the results numerically. The numerical results are depicted graphically to show the effects of phase lags, with and without energy dissipation on the resulting quantities. Some special cases are given.